Professur für Mikrosystem- und Gerätetechnik






  • FacebookTwitterXingYoutube
  • English

Publikationen

Jahr 2001

Bennini, F.; Mehner, J.; Dötzel, W.: Computational Methods for Reduced Order Modeling of Coupled Domain Simulations. Transducers '01 - 11th International Conference on Solid-State Sensors and Actuators, Munich (Germany), Proceedings, (2001), pp. 260-263
Bennini, F.; Mehner, J.; Dötzel, W.: A Modal Decomposition Technique for Fast Harmonic and Transient Simulations of MEMS. International MEMS Workshop 2001 (IMEMS 2001), Singapore, Proceedings, (2001), pp. 477-484
Bennini, F.; Mehner, J.; Dötzel, W.: Reduktion nichtlinearer Modelle für Komponenten- und Systemsimulation. 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), Proceedings, (2001)
Gessner, T.; Kurth, S.; Kaufmann, C.; Markert, J.; Dötzel, W.; Ehrlich,A.: Laser scan systems based on micro mirror units. 8th International Symposium on Microwave and Optical Technology ISMOT 01, Montreal, Quebec (Canada), Proceedings, (2001)
Gessner, T.; Kurth, S.; Kaufmann, C.; Markert, J.; DötzelW.: Micromirrors and micromirror arrays for scanning applications. SPIE, Proceedings, SPIE Vol. 4178, (2001), pp. 338-347
Hanf, M.; Kurth, S.; Faust, W.; Hahn, R.; Heinz, S.; Dötzel, W.; Gessner, T.: Einsatz von Mikrospiegel-Arrays zur Lichtmodulation in einem Hadamard-Transformations-Spektrometer. 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), Proceedings, (2001)
Hiller, K.; Kurth, S.; Zichner, N.; Gessner, T.; Dötzel, W.; Iwert, T.; Fritsch, H.; Biehl, S.: Bulk micromachined and wafer bonded resonators for vacuum pressure measurement. MST 2001, Düsseldorf (Germany), Proceedings, (2001), pp. 285-290
Hiller, K.; Kurth, S.; Zichner, N.; Mehner, J.; Kaufmann, C.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T.: Ein mikromechanischer Vakuumsensor nach dem Reibungsprinzip. 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), Proceedings, (2001)
Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Iwert, T.; Biehl, S.; Dötzel, W.; Gessner, T.: A micromachined pressure gauge for the vacuum range on damping of a resonator. SPIE - The International Society for Optical Engineering, Proceedings, SPIE Vol. 4559, (2001), pp. 103-111
Kurth, S.; Hiller, K.; Zichner, N.; Mehner, J.; Kaufmann, C.; et al.: A new Vacuum Friction Gauge based on a Si Tuning fork. Transducers '01 - 11th International Conference on Solid-State Sensors and Actuators, Munich (Germany), Proceedings, (2001), pp. 502-505
Löhr, K.; Mehner, J.; Dötzel, W.: Simulation viskoser Dämpfung in Mikrosystemen unter Verwendung von Analogiebeziehungen. 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), Proceedings, (2001)
Mehner, J.; Scheibner, D.; Wibbeler, J.: Silicon Vibration Sensor Array with Electrically Tunable Band Selectivity. Micro System Technologies, Düsseldorf (Germany), 2001 Mar 27-29, Proceedings, pp. 267-272
Scheibner, D.; Mehner, J.; Brämer, B.; Gessner, T.; Dötzel, W.: Abstimmbare Siliziumsensoren zur Vibrationsanalyse mit elektro-magnetischer Selbsttest-Funktionalität. 5. Chemnitzer Fachtagung Mikrosystemtechnik- Mikromechanik & Mikroelektronik, Chemnitz (Germany), 2001 Oct 23-24, Proceedings, pp. 99-104
Wachutka, G.; Mehner, J.; Schrag, G.; Voigt, P.: Short Course: Design and Simulation of MEMS. Transducers '01 - 11th International Conference on Solid-State Sensors and Actuators, Munich (Germany), (2001), Tutorial 4
Wibbeler, J.; Mehner, J.; Vogel, F.; Bennini, F.: Development of ANSYS/Multiphysics Modules for MEMS by CAD- FEM GmbH. Intern. Congress on FEM Technology 2001, Potsdam (Germany), Bd. 2, 2.4.6, (2001)
Wibbeler, J.; Scheibner, D.; Mehner, J.: Improved Coupled- Field FE Analysis of Micromachined Electromechanical Transducers. Transducers '01 - 11th International Conference on Solid-State Sensors and Actuators, Munich (Germany), 2001 Jun 10-14, Proceedings, pp. 240-243