Chemnitz UT: Faculty EE/IT: Chair of Microsystems and Precision Engineering: Research topics
Chair of Microsystems and Precision Engineering
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Chemnitz UT
Faculty EE/IT
Chair of Microsystems and Precision Engineering
Research topics
Chair
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Research topics
Pressure Sensor Catheter
Energy Harvesting
Spring Guides
Hadamard Transformation Spectrometer
Electrical Charge Measurements
Laser Projection
Micromechanical Step-by-Step Switch Gear
RF-MEMS
Test Structures
Vacuum Gauge
Vibration Sensors
ARB
FCOS
Research Topics
Here you find a selection of our research topics:
Pressure Sensor Catheter
Energy Harvesting
Silicon Spring Guides
Hadamard Transformation Spectrometer
Electrical Charge Measurements
Laser Projection
Micromechanical Step-by-Step Switch Gear
RF-MEMS - RF-Switch
Test Structures for Silicon Technologies
Vacuum Gauge
Vibration Sensors
Tunable Resonator Array
Force Coupled Oscillator System
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