Chair of Microsystems and Precision Engineering






Research Projects


Current:

Finished:

  • Visulase: Scanner preparation
  • SFB 379 Section A1: Component design
  • SFB 379 Section A4: Multi-range sensor array for movement analysis on the basis of near-surface Si-Bulk micro mechanics
  • SFB 379 Section B2: Experimental characterization, model adaption - reliability