Chair of Microsystems and Precision Engineering






  • Anmelden
  • Deutsch

Research Profile

Our research is focused on:

  • Design of microsystems and their application in a device environment
  • Modelling, simulation and experimental validation of the behaviour of micromechanical sensors and actuators
  • Measurement and test technology for microsystems
  • Development of design tools and methods
  • Mechanical stress, life, reliability
  • Characterization of MEMS and precision engineered structures