Chair of Microsystems and Precision Engineering






  • Anmelden
  • Deutsch

Equipment

Measurement equipment

  • Micro System Analyzer Polytec MSA 500
    • Scanning laser vibrometer
    • Stroboscopic video microscopy
    • White light interferometer
  • Vacuum probe station Suess PVM200
  • Wafer probe station Suess PM8
  • Vallen acoustic emission measurement system AMSY-5
  • Autofocus system OPM AF-16
  • Atomic force microscope Bruker NANOS
  • Real-Time spectrum analyzer Tektronix 3303B
  • Mixed-signal oszilloscope Tektronix MSO 4034
  • Laser vibrometers
  • Optical microscopes
  • Acceleration sensors
  • Modal exciters
  • LCR meter
  • Thermographic camera
Vakuumprober mit MSA 500
Vacuum probe station with Polytec MSA 500
 
Autofokusmesssystem OPM AF16
Autofocus sensor OPM AF-16

Software

  • ANSYS Multiphysics
  • Eagle
  • Mathematica
  • Matlab
  • ProEngineer
  • Softmems MEMSPro
  • MathCad