Professur Anorganische Chemie






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Robert Mothes

Dipl.-Chem. Robert Mothes
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+49(0)371 531 - 837723
As owner of research fellowship of the International Research Training Group (Internationales Graduiertenkolleg, GRK 1215) "Materials and Concepts for Advanced Interconnects and Nanosystems" the Deutsche Forschungsgemeinschaft (DFG) and the Chinese Ministry of Education is gratefully acknowledged. Logo IRTG

Field of Research

Precursor synthesis for CVD (Chemical Vapor Deposition), ALD (Atomic Layer Deposition) and Spin-Coating deposition techniques, particularly copper(I) and silver(I) complexes. A further topic to be investigated is the preparation of semi-conducting materials such as copper and silver chalcogenides (O, S, Se, Te). Figure 1 contains selected molecules.


Forschungsgebiet Robert Mothes

Fig. 1: Selected molecules to deposit (semi)conducting materials.

Publications

  1. Recent developments of oxamato and oxamidato monometallic complexes synthesis.
    F.E. Meva, R. Mothes, B. Bräuer, T. Rüffer, Z. Anorg. Allg. Chem. 2008, 634, 2062.

  2. Copper Oxide ALD from a Cu(I)-β-Diketonate; Detailed Growth Studies on SiO2 and TaN.
    T. Wächtler, N. Roth, R. Mothes, S. Schulze, S.E. Schulz, T. Gessner, H. Lang, M. Hietschold, ECS Trans. 2009, 25, 277–87.

  3. Phosphite Copper(I) Trifluoroacetates [((RO)3P)mCuO2CCF3] (m = 1, 2, 3): Synthesis, Solid State Structures and Their Potential Use as CVD Precursor.
    R. Mothes, T. Rüffer, Y. Shen, A. Jakob, B. Walfort, H. Petzold, S.E. Schulz, R. Ecke, T. Gessner, H. Lang, J. Chem. Soc., Dalton Trans. 2010, 39, 11235–11247.

  4. ALD-grown seed layers for electrochemical copper deposition integrated with different diffusion barrier systems.
    T. Wächtler, S.-F. Ding, L. Hofmann, R. Mothes, Q. Xie, S. Oswald, C. Detavernier, S.E. Schulz, X.-P. Qu, H. Lang, T. Gessner, Microelectron. Eng. 2011, 88, 684–689.

  5. Lewis-base Copper(I) Formates: Synthesis, Reaction Chemistry, Structural Characterization and Their Use as Spin-Coating Precursors for Copper Deposition.
    A. Tuchscherer, Y. Shen, A. Jakob, R. Mothes, M. Al-Anber, B. Walfort, T. Rüffer, S. Frühauf, R. Ecke, S.E. Schulz, T. Gessner, H. Lang, Inorg. Chim. Acta 2011, 365, 10–19.

  6. Hydroxy- and Boronic-Acid-Functionalized Carbosilanes: Synthesis and Solid State Structure of Si(C6H4-4-SiMe2((CH2)3OH))4.
    H. Lang, Z. Ishtaiwi, T. Rüffer, R. Mothes, B. Walfort, J. Organomet. Chem. 2011, 696, 1409–1515.

  7. Magneto-optical Kerr-effect studies on copper oxide thin films produced by atomic layer deposition on SiO2.
    M. Fronk, S. Müller, T. Wächtler, S.E. Schulz, R. Mothes, H. Lang, D.R.T. Zahn, G. Salvan, Thin Solid Films 2011, submitted.

  8. Facile Synthesis of Ag@Pd Satellites–Fe3O4 Core Nanocomposite as Efficient and Reusable Hydrogenation Catalysts.
    K. Jiang, H.-X. Zhang, Y.-Y. Yang, R. Mothes, H. Lang, W.-B. Cai, Chem. Commun. 2011, in press.

Oral presentation

  1. Precursor Synthesis and Deposition of (Semi)Conducting Materials.
    R. Mothes, IRTG Summer School 2009, 11th–18th May 2009, Shanghai/China.

  2. Precursor Synthesis and Deposition of (Semi)Conducting Materials.
    R. Mothes, 2nd International Main-Group-Element and Organometallic Meeting, 24th–27th Sept. 2009, Bad Schandau/Germany.

  3. Precursor Synthesis and Deposition of (Semi)Conducting Materials and Catalysis Development for CNT-CVD.
    R. Mothes, IRTG Summer School 2010, 26th March–1st April 2010, Chemnitz/Germany.

  4. Semiconducting Structures and Layers: Precursors for the Deposition of Copper- and Silver-Sulfide.
    R. Mothes, IRTG Summer School 2011, 7th–11th April 2011, Shanghai/China.

  5. Ag@Pd Satellites – Fe3O4 Core Nanocomposite.
    R. Mothes, IRTG PhD-Seminar 2011, 23th Sept. 2011, Chemnitz/Germany.

Poster presentation

  1. Recent developments of oxamato and oxamidato monometallic complexes synthesis.
    F.E. Meva, R. Mothes, B. Bräuer, T. Rüffer, 14. Vortragstagung Fachgruppe Festkörperchemie und Materialforschung, 24.–26. Sept. 2008, Bayreuth/Germany.

  2. New Materials and Chemistry: Small Molecules – Great Progress.
    R. Mothes, H. Lang, Global Challenges for Sustainable Development, (GCSD 2010), Sustainable Chemistry and Related Areas, 25th–26th Feb. 2010, Rennes/France.

  3. Metal- and Metal Oxid Nanoparticles.
    A. Jakob, A. Tuchscherer, S. Dietrich, R. Mothes, H. Lang, 6. Thüringer Grenz- und Oberflächentage (ThGOT) 2010, 07.–09. Sept. 2010, Gera/Germany.

  4. New Phosphine Copper(I) and Silver(I) Dithiocarbamates as Suitable Precursors for the Deposition of Copper- and Silver-Sulfide.
    R. Mothes, H. Lang, EuroCVD18, 4th–9th Sept. 2011, Kinsale, Co. Cork/Ireland.

  5. Semiconducting Structures and Layers: Precursors for the Deposition of Copper- and Silver-Sulfide.
    R. Mothes, H. Lang, 7. Thüringer Grenz- und Oberflächentage (ThGOT) 2011, 13th–14th Sept. 2011, Zeulenroda/Germany.